Scheduling Revisited Workstations in Integrated-Circuit Fabrication

Paul J. Kline

This paper describes the Photo Dispatcher system which has been developed to make machine-loading recommendations at a sat of key fab machines. Dispatching policies that generally perform well in job shops (e.g., Shortest Remaining Processing Time) perform poorly for workstations such as photolithography which are visited multiple times by the same lot of silicon wafers.

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